Investigation of abnormal negative threshold voltage shift under positive bias stress in input/output n-channel metal-oxide-semiconductor field-effect transistors with TiN/HfO2 structure using fast I-V measurement

标题
Investigation of abnormal negative threshold voltage shift under positive bias stress in input/output n-channel metal-oxide-semiconductor field-effect transistors with TiN/HfO2 structure using fast I-V measurement
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 104, Issue 11, Pages 113503
出版商
AIP Publishing
发表日期
2014-03-18
DOI
10.1063/1.4868532

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