Low trap states in in situ SiNx/AlN/GaN metal-insulator-semiconductor structures grown by metal-organic chemical vapor deposition
出版年份 2014 全文链接
标题
Low trap states in in situ SiNx/AlN/GaN metal-insulator-semiconductor structures grown by metal-organic chemical vapor deposition
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 105, Issue 10, Pages 102911
出版商
AIP Publishing
发表日期
2014-09-13
DOI
10.1063/1.4895677
参考文献
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