Optoelectronic properties of ZnO film on silicon after SF6 plasma treatment and milliseconds annealing

标题
Optoelectronic properties of ZnO film on silicon after SF6 plasma treatment and milliseconds annealing
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 105, Issue 22, Pages 221903
出版商
AIP Publishing
发表日期
2014-12-03
DOI
10.1063/1.4903074

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