Article
Physics, Applied
Ding Wang, Ping Wang, Minming He, Jiangnan Liu, Shubham Mondal, Mingtao Hu, Danhao Wang, Yuanpeng Wu, Tao Ma, Zetian Mi
Summary: In this Letter, fully epitaxial ScAlN/AlGaN/GaN based ferroelectric high electron mobility transistors (HEMTs) were demonstrated using molecular beam epitaxy. The fabricated ferroelectric gate HEMTs showed counterclockwise hysteretic transfer curves with a wide threshold voltage tuning range, a large ON/OFF ratio, and reconfigurable output characteristics. The high quality ferroelectric gate stack and effective ferroelectric polarization coupling lead to improved subthreshold performance. These results provide fundamental insight into the ferroelectric polarization coupling and threshold tuning processes in ferroelectric nitride heterostructures and have promising applications in next-generation electronics.
APPLIED PHYSICS LETTERS
(2023)
Article
Physics, Applied
Mei Ge, Yi Li, Youhua Zhu, Dunjun Chen, Zhiliang Wang, Shuxin Tan
Summary: The improved e-mode AlGaN/GaN HEMT with a gate stack beta-Ga2O3/p-GaN structure outperforms the conventional p-GaN gate HEMT, mainly due to the use of the beta-Ga2O3 layer which reduces the electric field strength in the gate region and decreases off-state leakage current. Additionally, there is a trade-off between the thickness of the beta-Ga2O3 layer and the performance of the device.
JOURNAL OF APPLIED PHYSICS
(2021)
Article
Materials Science, Coatings & Films
Stefan Schmult, Pascal Appelt, Claudia Silva, Steffen Wirth, Andre Wachowiak, Andreas Grosser, Thomas Mikolajick
Summary: Inconsistencies in the concentrations of unintentional donor impurities and free charge carriers in GaN/AlGaN layer stacks containing a two-dimensional electron gas (2DEG) can be explained by the measurement procedure and the method of extracting the free charge carrier concentration. When the 2DEG acts as the bottom electrode in capacitance versus voltage measurements, unphysically low concentrations of free charges are calculated due to the depletion of the 2DEG and the disappearance of the bottom electrode. It is shown that, for the case of a defined (non-vanishing) bottom electrode, the levels of donor impurities and resulting free charges consistently match.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2023)
Article
Engineering, Electrical & Electronic
Yixu Yao, Sen Huang, Qimeng Jiang, Xinhua Wang, Lan Bi, Wen Shi, Fuqiang Guo, Tiantian Luan, Jie Fan, Haibo Yin, Ke Wei, Yingkui Zheng, Jingyuan Shi, Yankui Li, Qian Sun, Xinyu Liu
Summary: A drain-controlled current-mode deep level transient spectroscopy (I-DLTS) was developed to investigate the Semi-ON-state current collapse in AlGaN/GaN high electron mobility transistors (HEMTs). By inserting a graded AlGaN back-barrier, the charging of buffer traps induced by hot-electron effect was effectively blocked, resulting in a suppressed current collapse in AlGaN/GaN HEMTs under Semi-ON-state stress.
IEEE ELECTRON DEVICE LETTERS
(2022)
Article
Physics, Multidisciplinary
Si-De Song, Su-Zhen Wu, Guo-Zhu Liu, Wei Zhao, Yin-Quan Wang, Jian-Wei Wu, Qi He
Summary: In this study, the degradation mechanisms of enhancement-mode p-GaN gate AlGaN/GaN high-electron mobility transistor were extensively analyzed under different stress conditions. The results showed that the device exhibited different electrical characteristics under various stress conditions, indicating excellent performance under reverse gate bias stress. These findings are significant in guiding process optimization towards a high voltage and highly reliable enhanced AlGaN/GaN high-electron mobility transistor.
Article
Engineering, Electrical & Electronic
Nipun Sharma, Sumit Kumar, Ankur Gupta, Surani Bin Dolmanan, Dharmraj Subhash Kotekar Patil, Swee Tiam Tan, Sudhiranjan Tripathy, Mahesh Kumar
Summary: By employing MoS2 functionalization on AlGaN/GaN HEMTs sensors, the researchers have successfully developed a sensitive and selective gas sensor for NO2 detection at room temperature. The sensor exhibited enhanced sensing response and complete recovery without any external stimuli, making it a promising candidate for nitride-based integrated electronics.
SENSORS AND ACTUATORS A-PHYSICAL
(2022)
Article
Engineering, Electrical & Electronic
Jingyu Shen, Chao Yang, Liang Jing, Jingwei Guo, Ping Li, Hao Wu, Shengdong Hu
Summary: In this study, an enhancement mode p-GaN gate HEMT with selective regrowth and strain engineering has been proposed. The device shows improved 2DEG density and surface electric field distribution, leading to significant improvements in ON-resistance and breakdown voltage.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2023)
Article
Materials Science, Multidisciplinary
Shaoqian Lu, Guohao Yu, Yingfei Sun, Xu Yuan, Zhongkai Du, Bingliang Zhang, Lu Wang, Yu Li, Dongdong Wu, Zengli Huang, Zhongming Zeng, Xulei Qin, Baoshun Zhang
Summary: In this article, a method of nitrogen plasma treatment is proposed to achieve normally off p-GaN/AlGaN/GaN high-electron-mobility transistors, and the related mechanism is proposed. The nitrogen plasma treatment depletes holes in the p-GaN layer and changes the surface characteristics, resulting in the formation of a 2D electron gas at the AlGaN/GaN interface. The device shows enhanced performance with improved threshold voltage, on/off ratio, and maximum drain current.
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
(2023)
Proceedings Paper
Engineering, Electrical & Electronic
M. Moscotin, J. Jorudas, M. Saniuk, P. Prystawko, S. L. Rumyantsev, W. Knap, G. Cywinski, I. Kasalynas
Summary: In this work, we investigated the use of THz antenna coupled AlGaN/GaN high electron mobility transistors (HEMTs) in EdgeFET and FinFET designs to develop a sensitive TeraFET detector. The experimental results demonstrated the dependence of sensitivity on channel length, and studied two types of radiation coupling via ohmic and capacitive connection of THz antennas.
2023 48TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, IRMMW-THZ
(2023)
Article
Engineering, Electrical & Electronic
S. Niranjan, R. Muralidharan, Prosenjit Sen, Digbijoy N. Nath
Summary: This article reports on the electrical performance of AlGaN/GaN high-electron mobility transistors (HEMTs) fabricated using an Au-free process on flexible Kapton tape. The flexible HEMT shows a slightly higher ON-current when bent, while the OFF-state performance remains unaffected. The electrical characteristics of the transferred devices indicate a reduction in 2-DEG concentration and ON-current compared to the original HEMTs.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2022)
Article
Metallurgy & Metallurgical Engineering
Bhubesh Chander Joshi
Summary: AlGaN/GaN heterostructures are promising for high-speed and high-power electronic devices. Due to the lack of native substrates, they are grown on foreign materials using two-step growth techniques. In this study, test structures, TLM pads, FET structure, ohmic contacts, and Schottky contacts were fabricated on AlGaN/GaN heterostructure. Transmission line measurement and current voltage measurement were used for characterization.
INTERNATIONAL JOURNAL OF MATERIALS RESEARCH
(2023)
Article
Physics, Applied
Mohammad Wahidur Rahman, Nidhin Kurian Kalarickal, Hyunsoo Lee, Towhidur Razzak, Siddharth Rajan
Summary: In this study, AlGaN/GaN HEMTs integrated with high permittivity BaTiO3 dielectric were discussed to enhance the breakdown characteristics. The use of high permittivity BaTiO3 dielectric layers prevented premature gate breakdown and enabled higher breakdown fields, leading to devices with high power figure of merit. This work demonstrates that electrostatic engineering with high-permittivity dielectrics can push AlGaN/GaN HEMTs closer to material breakdown field limits.
APPLIED PHYSICS LETTERS
(2021)
Article
Materials Science, Multidisciplinary
Stefan Moench, Stefan Mueller, Richard Reiner, Patrick Waltereit, Heiko Czap, Michael Basler, Jan Hueckelheim, Lutz Kirste, Ingmar Kallfass, Ruediger Quay, Oliver Ambacher
Summary: Experimental comparison between a high-voltage AlN/GaN superlattice (SL) buffer and a step-graded AlGaN/GaN buffer for monolithic AlGaN/GaN power circuits showed that the SL buffer performs better in mitigating negative back gating effects and leakage at positive substrate voltage, making it more suitable for high-voltage power topology operation. Additionally, HEMTs on the SL buffer exhibited minimal threshold voltage shift at negative substrate bias, allowing for efficient operation of monolithic high-voltage power topologies.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
(2021)
Article
Engineering, Electrical & Electronic
Yuji Ando, Ryutaro Makisako, Hidemasa Takahashi, Akio Wakejima, Jun Suda
Summary: This article presents a high throughput 150-nm-gate AlGaN/GaN HEMT process using i-line stepper lithography and a thermal reflow technique. Despite unoptimized structures, the fabricated devices showed promising performance, with a maximum drain current of 0.65 A/mm and a gate-drain breakdown voltage exceeding 200 V.
ELECTRONICS LETTERS
(2021)
Article
Physics, Applied
Hong-Quan Nguyen, Thanh Nguyen, Philip Tanner, Tuan-Khoa Nguyen, Abu Riduan Md Foisal, Jarred Fastier-Wooller, Tuan-Hung Nguyen, Hoang-Phuong Phan, Nam-Trung Nguyen, Dzung Viet Dao
Summary: The study demonstrates the effect of stress or strain on the electronic characteristics of a normally off AlGaN/GaN HEMT and its potential as a highly sensitive pressure sensor with a strain sensitivity of 1250ppm(-1).
The change in drain current is most pronounced when the gate bias is near-threshold and the drain bias is slightly larger than the saturation bias.
APPLIED PHYSICS LETTERS
(2021)
Article
Engineering, Electrical & Electronic
Jiejie Zhu, Yingcong Zhang, Xiaohua Ma, Siyu Liu, Siqi Jing, Qing Zhu, Minhan Mi, Bin Hou, Ling Yang, Michael J. Uren, Martin Kuball, Yue Hao
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2020)
Article
Physics, Applied
Jiejie Zhu, Yingcong Zhang, Michael J. Uren, Siyu Liu, Pengfei Wang, Minhan Mi, Bin Hou, Ling Yang, Martin Kuball, Xiaohua Ma, Yue Hao
APPLIED PHYSICS LETTERS
(2020)
Article
Chemistry, Physical
Matthew D. Smith, Xu Li, Michael J. Uren, Iain G. Thayne, Martin Kuball
APPLIED SURFACE SCIENCE
(2020)
Article
Engineering, Electrical & Electronic
Filip Wach, Michael J. Uren, Benoit Bakeroot, Ming Zhao, Stefaan Decoutere, Martin Kuball
IEEE ELECTRON DEVICE LETTERS
(2020)
Article
Engineering, Electrical & Electronic
Durgesh C. Tripathi, Michael J. Uren, Dan Ritter
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2020)
Review
Physics, Applied
Michael J. Uren, Martin Kuball
Summary: This article examines the impact of buffer doping on the critical performance issues of GaN high electron mobility transistors, showing that carbon can lead to the epitaxial buffer becoming p-type and electrically isolated from the two-dimensional electron gas. Simulation models are used to explain a wide range of experimental observations related to current-collapse and dynamic R-ON in power switches, as well as other phenomena in RF GaN-on-SiC devices.
JAPANESE JOURNAL OF APPLIED PHYSICS
(2021)
Article
Physics, Applied
Markus Wohlfahrt, Michael J. Uren, Felix Kaess, Oleg Laboutin, Hassan Hirshy, Martin Kuball
Summary: AlGaN/GaN High Electron Mobility Transistors (HEMTs) exhibit a UV-induced persistent photoconductivity (PPC) effect, which is related to changes in electronic band bending in the buffer layer. This effect is significant only in p-type buffers and allows for quantification of deep-level doping density, with recovery times extending to several days.
APPLIED PHYSICS LETTERS
(2021)
Article
Engineering, Electrical & Electronic
Thomas Gerrer, James Pomeroy, Feiyuan Yang, Daniel Francis, Jim Carroll, Brian Loran, Larry Witkowski, Marty Yarborough, Michael J. Uren, Martin Kuball
Summary: The reliable operation of high-power GaN amplifiers depends on the mutual optimization of design parameters and a defined thermal budget. Finite element simulations provide design rules for GaN-on-diamond amplifier structures, showcasing better performance compared to GaN-on-SiC. Diamond substrates demonstrate superior heat dissipation capabilities, resulting in lower peak channel temperatures.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Engineering, Electrical & Electronic
Stefano Dalcanale, Michael J. Uren, Josephine Chang, Ken Nagamatsu, Justin A. Parke, Robert S. Howell, Martin Kuball
Summary: A novel noise analysis method was used to study leakage current during time-dependent dielectric degradation under bias stress, showing that an additional low bias noise test can detect the onset of permanent localized breakdown earlier.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Engineering, Electrical & Electronic
Feiyuan Yang, Michael J. Uren, Mark Gajda, Stefano Dalcanale, Serge Karboyan, James W. Pomeroy, Martin Kuball
Summary: This study investigates charge trapping in power AlGaN/GaN high electron mobility transistors, finding that high Si concentration passivation can suppress charge trapping and stress can induce negative charge trapping in the gate-drain access region. Electroluminescence (EL) measurements reveal that EL emitted near the drain edge might be obscured by the field plates, cautioning against using EL alone to locate high field regions in the device. Temperature-dependent dynamic R (ON) transient measurements suggest 'trap' responses with an activation energy of around 0.48 eV and located in the heavily carbon-doped GaN layer, explained by the leaky dielectric model.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2021)
Article
Engineering, Electrical & Electronic
Yuke Cao, James W. Pomeroy, Michael J. Uren, Feiyuan Yang, Martin Kuball
Summary: Electric-field-induced second harmonic generation is utilized to map the electric field distribution in the device channel of GaN-based high-electron-mobility transistors. The study shows that changes in carbon dopant concentration can significantly affect the electric field distribution in the devices, highlighting the role of dopants in altering the device characteristics. Additionally, dislocation-related leakage paths can lead to inhomogeneity in the electric field within the devices.
NATURE ELECTRONICS
(2021)
Article
Engineering, Electrical & Electronic
Feiyuan Yang, Manikant Singh, Michael J. Uren, Trevor Martin, Hassan Hirshy, Michael A. Casbon, Paul J. Tasker, Martin Kuball
Summary: The breakdown mechanism in 0.25-μm gate length AlGaN/GaN-on-SiC transistors is investigated using the drain current injection technique. The results show that breakdown can be divided into two stages, which are related to gate voltage levels and material characteristics.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2022)
Article
Physics, Applied
Yuke Cao, James W. Pomeroy, Michael J. Uren, Feiyuan Yang, Jingshan Wang, Patrick Fay, Martin Kuball
Summary: The electric field distribution of GaN-on-GaN p-n diodes with partially compensated ion-implanted edge termination (ET) was characterized using an electric field induced second harmonic generation technique (EFISHG). The effectiveness of the ET structure was confirmed by the distributed electric field from the anode to the outer edge of the ET. However, the effectiveness was found to be strongly dependent on the acceptor charge distribution in the partially compensated layer (PC) of the ET.
APPLIED PHYSICS LETTERS
(2022)
Article
Physics, Applied
Zequan Chen, Abhishek Mishra, Aditya K. Bhat, Matthew D. Smith, Michael J. Uren, Sandeep Kumar, Masataka Higashiwaki, Martin Kuball
Summary: The frequency dispersion of impedance in lateral beta-Ga2O3 MOSFETs has been studied and a model has been developed to explain the phenomenon. The dispersion is caused by the resistive and capacitive coupling between the terminal contact pads and the buried conducting layer at the unintentionally-doped epitaxy/substrate interface, which also leads to a buried parallel leakage path. It is shown that the dispersion is not related to gate dielectric traps, as commonly assumed. A generalized equivalent circuit model is proposed to explain the experimental results.
APPLIED PHYSICS EXPRESS
(2023)
Article
Engineering, Electrical & Electronic
Akhil S. Kumar, Michael J. Uren, Justin Parke, H. George Henry, Robert S. Howell, Martin Kuball
Summary: Multichannel RF power amplifiers provide high frequency operation, high current and RF power, and excellent linearity. By using 3D and 2D simulations, the impact of device architecture on linearity and off-state reliability can be investigated, leading to an improved linear design without compromising reliability. Linearity is assessed using a 2D approximation which is computationally efficient, while off-state reliability is evaluated using a full 3D simulation to measure peak electric field. The study suggests that introducing channel number-dependent doping can enhance transconductance-linearity, and increasing gate dielectric thickness or fin width leads to a strong increase in third order intercept, while maintaining reliability requires increased fin height to reduce electric field.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2023)