Two-photon nanolithography of positive photoresist thin film with ultrafast laser direct writing

标题
Two-photon nanolithography of positive photoresist thin film with ultrafast laser direct writing
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 20, Pages 201108
出版商
AIP Publishing
发表日期
2013-05-22
DOI
10.1063/1.4807678

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