Huge increase in gas phase nanoparticle generation by pulsed direct current sputtering in a reactive gas admixture

标题
Huge increase in gas phase nanoparticle generation by pulsed direct current sputtering in a reactive gas admixture
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 103, Issue 3, Pages 033118
出版商
AIP Publishing
发表日期
2013-07-19
DOI
10.1063/1.4816036

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