Size-controlled formation of Cu nanoclusters in pulsed magnetron sputtering system

标题
Size-controlled formation of Cu nanoclusters in pulsed magnetron sputtering system
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 8-9, Pages 2755-2762
出版商
Elsevier BV
发表日期
2010-10-17
DOI
10.1016/j.surfcoat.2010.10.030

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