Formation of substoichiometric GeOx at the Ge–HfO2 interface

标题
Formation of substoichiometric GeOx at the Ge–HfO2 interface
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 97, Issue 20, Pages 202908
出版商
AIP Publishing
发表日期
2010-11-19
DOI
10.1063/1.3518491

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