Modeling of leakage currents in high-κ dielectrics: Three-dimensional approach via kinetic Monte Carlo

标题
Modeling of leakage currents in high-κ dielectrics: Three-dimensional approach via kinetic Monte Carlo
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 96, Issue 6, Pages 062113
出版商
AIP Publishing
发表日期
2010-02-10
DOI
10.1063/1.3310065

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