4.6 Article

The physical origin of random telegraph noise after dielectric breakdown

期刊

APPLIED PHYSICS LETTERS
卷 94, 期 13, 页码 -

出版社

AMER INST PHYSICS
DOI: 10.1063/1.3114410

关键词

dielectric materials; electric breakdown; electron energy loss spectra; leakage currents; MOSFET; percolation; random noise; scanning electron microscopy; semiconductor device noise; silicon compounds; switching; transmission electron microscopy

资金

  1. STEM/EELS
  2. Ministry of Education (MOE) [T206B1205]
  3. NTU [RGM 12/07]

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Our results show that the physical origin of the digital telegraph noise observed in the early stage of the progressive breakdown is originated from the defective oxide with low oxygen concentrations. The outer shells of the percolation path contribute significantly to the random switching of current levels as a result of the ON/OFF state of percolation path. The formation of a nanosize conductive Si path in the inner shell of the percolation path pushes the oxide to a high leakage state and suppresses the visibility of the digital noise.

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