Impact of Kr gas mixing in oxygen plasma etching of ferroelectric poly(vinylidene fluoride-trifluoroethylene) copolymer films

标题
Impact of Kr gas mixing in oxygen plasma etching of ferroelectric poly(vinylidene fluoride-trifluoroethylene) copolymer films
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 93, Issue 16, Pages 162904
出版商
AIP Publishing
发表日期
2008-10-25
DOI
10.1063/1.2970085

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