Growth and Separation of High Quality GaN Epilayer from Sapphire Substrate by Lateral Epitaxial Overgrowth and Wet Chemical Etching

标题
Growth and Separation of High Quality GaN Epilayer from Sapphire Substrate by Lateral Epitaxial Overgrowth and Wet Chemical Etching
作者
关键词
-
出版物
Applied Physics Express
Volume 4, Issue 1, Pages 012104
出版商
IOP Publishing
发表日期
2010-12-24
DOI
10.1143/apex.4.012104

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