期刊
APPLIED PHYSICS EXPRESS
卷 1, 期 12, 页码 -出版社
JAPAN SOCIETY APPLIED PHYSICS
DOI: 10.1143/APEX.1.124002
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资金
- Ministry of Education. Culture, Sports, Science and Technology. Japan [18069010, 18310079]
- Grants-in-Aid for Scientific Research [18310079] Funding Source: KAKEN
The Ti-mask selective-area growth (SAG) of GaN on Ti-nanohole-patterned GaN templates by rf-plasma-assisted molecular-beam epitaxy was employed to demonstrate the fabrication of regularly arranged InGaN/GaN nanocolumns. The SAG of GaN nanocolumns strongly depended on the growth temperature (T(g)); at T(g) below 900 degrees C, no SAG occurred, but above 900 degrees C, SAG occurred. However, an excessive increase in T(g) to above 900 degrees C at a nitrogen flow rate (Q(N2)) of 3.5 sccm brought about increased inhomogeneity in the nanocolumn shape. Upon reducing Q(N2) from 3.5 to 1 sccm, uniform nanocolumn arrays were successfully grown around the critical temperature of 900 degrees C. (C) 2008 The Japan Society of Applied Physics
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