期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 116, 期 2, 页码 555-560出版社
SPRINGER
DOI: 10.1007/s00339-014-8522-0
关键词
-
资金
- Scientic and Technological Research Council of Turkey (TUBITAK) [110T330]
- Turkish Academy of Sciences (TUBA GEBIP)
- TUBITAK
The influence of beam intensity on laser ablation quality and ablation size is experimentally studied on graphene-coated silicon/silicon dioxide substrates. With an amplified femtosecond-pulsed laser system, by systematically decreasing the average power, periodic stripes with decreasing widths are ablated. Histogram analyses of the untouched and ablated regions of scanning electron microscope images of the fabricated structures make it possible to quantify the ablation quality. These analyses reveal that submicron ablation can be achieved while maintaining 75 % ablation accuracy by adjusting the beam intensity around the ablation threshold.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据