Lateral resolution in focused electron beam-induced deposition: scaling laws for pulsed and static exposure

Fabrication of an UltraLow-Resistance Ohmic Contact to MWCNT–Metal Interconnect Using Graphitic Carbon by Electron Beam-Induced Deposition (EBID)

(2012) Songkil Kim et al.   IEEE TRANSACTIONS ON NANOTECHNOLOGY

Role of Activated Chemisorption in Gas-Mediated Electron Beam Induced Deposition

(2012) James Bishop et al.   PHYSICAL REVIEW LETTERS

The Direct Writing of Plasmonic Gold Nanostructures by Electron-Beam-Induced Deposition

(2011) Katja Höflich et al.   ADVANCED MATERIALS

Kinetics of gas mediated electron beam induced etching

(2011) Steven Randolph et al.   APPLIED PHYSICS LETTERS

Nanosynthesis of Tunable Composite Materials by Room-Temperature Pulsed Focused Electron Beam Induced Chemical Vapour Deposition

(2011) M. S. Gabureac et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Determination of the Surface Diffusion Coefficient and the Residence Time of Adsorbates via Local Focused Electron Beam Induced Chemical Vapour Deposition

(2011) Aleksandra Szkudlarek et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Small, Minimally Invasive, Direct: Electrons Induce Local Reactions of Adsorbed Functional Molecules on the Nanoscale

(2010) Ivo Utke et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Tunable Nanosynthesis of Composite Materials by Electron-Impact Reaction

(2010) Laurent Bernau et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Gas-assisted focused electron beam and ion beam processing and fabrication

(2008) Ivo Utke et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B