Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding

出版年份 2010 全文链接

标题

作者

关键词

出版物

Volume 16, Issue 8-9, Pages 1485-1493

出版商

Springer Nature

发表日期

2010-01-25

DOI

10.1007/s00542-010-1020-1

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