Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers

标题
Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers
作者
关键词
-
出版物
ADVANCED MATERIALS
Volume 23, Issue 11, Pages 1346-1350
出版商
Wiley
发表日期
2011-02-09
DOI
10.1002/adma.201003625

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