Low-temperature fabrication of solution-processed hafnium oxide gate insulator films using a thermally purified solution process
出版年份 2018 全文链接
标题
Low-temperature fabrication of solution-processed hafnium oxide gate insulator films using a thermally purified solution process
作者
关键词
-
出版物
Journal of Materials Chemistry C
Volume 6, Issue 18, Pages 4928-4935
出版商
Royal Society of Chemistry (RSC)
发表日期
2018-04-11
DOI
10.1039/c8tc00899j
参考文献
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