Mechanically robust TiAlSiN coatings prepared by pulsed-DC magnetron sputtering system: Scratch response and tribological performance

标题
Mechanically robust TiAlSiN coatings prepared by pulsed-DC magnetron sputtering system: Scratch response and tribological performance
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 645, Issue -, Pages 222-230
出版商
Elsevier BV
发表日期
2017-11-01
DOI
10.1016/j.tsf.2017.10.058

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