4.4 Article Proceedings Paper

Resistive switching behavior of Ga doped ZnO-nanorods film conductive bridge random access memory

期刊

THIN SOLID FILMS
卷 660, 期 -, 页码 828-833

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2018.03.027

关键词

Resistive switching; Nanorods; Gallium; Zinc oxide; Conductive-bridge random-access memory; Chemical solution deposition

资金

  1. Ministry of Science and Technology, Taiwan [MOST 105-2221-E-009-143-MY3, MOST-107-2633-E-009-003]

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The influence of Ga dopant on resistive switching behavior of ZnO-nanorods film conducting bridge random access memory was investigated. Using a hydrothermal process, we grew vertically well-aligned and uniform Ga doped ZnO (GZO)-NRs films on transparent glass substrates to fabricate Cu/TiW/GZO-NRs/Indium Tin Oxide/Glass devices. The GZO-NRs film provides a diffusion path for the Cu ions to form a conducting bridge; thus, reducing the formation of a branched filament. The Ga dopant induces a significant improvement in switching distribution of high resistance states (HRS) and low resistance states (LRS). The 1.5 mol% Ga doped device exhibits good retention up to 10(4) s and high HRS/LRS ratio of 30 times. Therefore, our proposed device structure may be a good candidate for future conductive-bridge resistive random access memory application.

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