Study on properties of Ga/F-co-doped ZnO thin films prepared using atomic layer deposition

标题
Study on properties of Ga/F-co-doped ZnO thin films prepared using atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume -, Issue -, Pages -
出版商
Elsevier BV
发表日期
2018-02-21
DOI
10.1016/j.tsf.2018.02.030

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