Fabrication of a Curved Row–Column Addressed Capacitive Micromachined Ultrasonic Transducer Array

标题
Fabrication of a Curved Row–Column Addressed Capacitive Micromachined Ultrasonic Transducer Array
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 25, Issue 4, Pages 675-682
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2016-06-25
DOI
10.1109/jmems.2016.2580152

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