XPS Depth Profile Analysis of Zn3N2 Thin Films Grown at Different N2/Ar Gas Flow Rates by RF Magnetron Sputtering

The effects of the pressure and the oxygen content of the sputtering gas on the structure and the properties of zinc oxy-nitride thin films deposited by reactive sputtering of zinc

(2013) Nanke Jiang et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

On the true optical properties of zinc nitride

(2011) C. García Núñez et al.   APPLIED PHYSICS LETTERS

On the zinc nitride properties and the unintentional incorporation of oxygen

(2011) C. García Núñez et al.   THIN SOLID FILMS

Structural and electrical characteristics of high quality (100) orientated-Zn3N2 thin films grown by radio-frequency magnetron sputtering

(2010) G. Z. Xing et al.   JOURNAL OF APPLIED PHYSICS

Properties of n-type ZnN thin films as channel for transparent thin film transistors

(2009) E. Aperathitis et al.   THIN SOLID FILMS

Optical properties of zinc nitride thin films fabricated by rf-sputtering from ZnN target

(2008) P. Voulgaropoulou et al.   THIN SOLID FILMS