A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure

标题
A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 1, Pages 015025
出版商
IOP Publishing
发表日期
2009-12-08
DOI
10.1088/0960-1317/20/1/015025

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