Towards an electronic grade nanoparticle-assembled silicon thin film by ballistic deposition at room temperature: the deposition method, and structural and electronic properties

标题
Towards an electronic grade nanoparticle-assembled silicon thin film by ballistic deposition at room temperature: the deposition method, and structural and electronic properties
作者
关键词
-
出版物
Journal of Materials Chemistry C
Volume 5, Issue 15, Pages 3725-3735
出版商
Royal Society of Chemistry (RSC)
发表日期
2017-03-15
DOI
10.1039/c7tc00187h

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