Structural evolution of nanocrystalline silicon thin films synthesized in high-density, low-temperature reactive plasmas

标题
Structural evolution of nanocrystalline silicon thin films synthesized in high-density, low-temperature reactive plasmas
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 20, Issue 21, Pages 215606
出版商
IOP Publishing
发表日期
2009-05-07
DOI
10.1088/0957-4484/20/21/215606

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