Influence of substrate bias on microstructural evolution and mechanical properties of TiAlSiN thin films deposited by pulsed-DC magnetron sputtering

标题
Influence of substrate bias on microstructural evolution and mechanical properties of TiAlSiN thin films deposited by pulsed-DC magnetron sputtering
作者
关键词
Titanium aluminum silicon nitride, Pulsed DC bias, Structural evolution, Mechanical properties, Magnetron sputtering
出版物
THIN SOLID FILMS
Volume 639, Issue -, Pages 137-144
出版商
Elsevier BV
发表日期
2017-08-24
DOI
10.1016/j.tsf.2017.08.036

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