期刊
THIN SOLID FILMS
卷 638, 期 -, 页码 153-158出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2017.07.050
关键词
Electromagnetic linear venetian blind plasma filter; Tetrahedral amorphous carbon (ta-C); Diamond-like carbon; X-ray photoelectron spectroscopy; Adhesion; Hardness; Young's modulus; Tool wear
类别
资金
- Smart Growth Operational Programme : Developmental Project [POIR. 01.01.01-00-0531/15-00]
- Marie Curie International Research Staff Exchange Scheme Fellowship within the 7th European Community Framework Programme [ImBeing - FP7 - PEOPLE - 2013 - IRSES - 612593]
In this paper, we present the results of studies determining the optimum thickness of amorphous tetrahedral carbon (ta-C) thin films for industrial applications. ta-C coatings from 50 to 1000 nm thickness were synthesized by a pulsed vacuum-arc method using a water-cooled electromagnetic Venetian blind plasma filter. Systematic studies of the thickness dependence of the microstructure and mechanical properties showed that the content of sp(3) bonds in all the deposited coatings are equal (about 68%), but the 300 nm thick coatings exhibited the best mechanical properties (hardness H>50 GPa, adhesion L-c2 = 48 N). These coatings were deposited on industrial cutting taps with 2 and 2.5 mm diameters and tested in industrial conditions. The results of the threading tests performed with Inox stainless steel showed that the durability of the ta-C coated tools were significantly higher compared with the uncoated ones. These real-world industrial tests confirmed the usefulness of the electromagnetic Venetian blind plasma filter for synthesizing thin ta-C coatings with excellent physico-mechanical characteristics. (C) 2017 Published by Elsevier B.V.
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