Prospects of extreme ultraviolet radiation sources based on microwave discharge for high-resolution lithography

Plasma heating and coupling of electromagnetic waves near the upper-hybrid resonance in high-βdevices

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Theory of a stationary microwave discharge with multiply charged ions in an expanding gas jet

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Recent Advances in the Worldwide Fusion Gyrotron Development

(2014) Manfred Thumm   IEEE TRANSACTIONS ON PLASMA SCIENCE

Gas-dynamic trap: an overview of the concept and experimental results

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Source for extreme ultraviolet lithography based on plasma sustained by millimeter-wave gyrotron radiation

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Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge

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Lithography gets extreme

(2009) Christian Wagner et al.   Nature Photonics