Shaping thin film growth and microstructure pathways via plasma and deposition energy: a detailed theoretical, computational and experimental analysis

标题
Shaping thin film growth and microstructure pathways via plasma and deposition energy: a detailed theoretical, computational and experimental analysis
作者
关键词
-
出版物
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
Volume 19, Issue 7, Pages 5591-5610
出版商
Royal Society of Chemistry (RSC)
发表日期
2017-02-07
DOI
10.1039/c6cp06003j

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