CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic Structure

标题
CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic Structure
作者
关键词
Photonic crystal, PC-based nanofluidic structure, CMOS-compatible process, Periodical Si<sub>3</sub>N<sub>4</sub> gratings
出版物
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
出版商
Springer Nature
发表日期
2017-02-09
DOI
10.1186/s11671-017-1849-7

向作者/读者发起求助以获取更多资源

Reprint

联系作者

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More