标题
CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic Structure
作者
关键词
Photonic crystal, PC-based nanofluidic structure, CMOS-compatible process, Periodical Si<sub>3</sub>N<sub>4</sub> gratings
出版物
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
出版商
Springer Nature
发表日期
2017-02-09
DOI
10.1186/s11671-017-1849-7
参考文献
相关参考文献
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