Topography preserved microwave plasma etching for top-down layer engineering in MoS2and other van der Waals materials
出版年份 2017 全文链接
标题
Topography preserved microwave plasma etching for top-down layer engineering in MoS2and other van der Waals materials
作者
关键词
-
出版物
Nanoscale
Volume 9, Issue 11, Pages 3818-3825
出版商
Royal Society of Chemistry (RSC)
发表日期
2017-02-01
DOI
10.1039/c7nr00284j
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Laterally Stitched Heterostructures of Transition Metal Dichalcogenide: Chemical Vapor Deposition Growth on Lithographically Patterned Area
- (2016) Henan Li et al. ACS Nano
- Monolithic 3D CMOS Using Layered Semiconductors
- (2016) Angada B. Sachid et al. ADVANCED MATERIALS
- Effects of nitrogen plasma treatment on the electrical property and band structure of few-layer MoS2
- (2016) APPLIED PHYSICS LETTERS
- Thin Film Transistors Using Wafer-Scale Low-Temperature MOCVD WSe2
- (2016) Yiyang Gong et al. JOURNAL OF ELECTRONIC MATERIALS
- Transport Properties of a MoS2/WSe2 Heterojunction Transistor and Its Potential for Application
- (2016) Amirhasan Nourbakhsh et al. NANO LETTERS
- Pushing the Performance Limit of Sub-100 nm Molybdenum Disulfide Transistors
- (2016) Yuan Liu et al. NANO LETTERS
- Electron beam directed etching of hexagonal boron nitride
- (2016) Christopher Elbadawi et al. Nanoscale
- Atomic-layer soft plasma etching of MoS2
- (2016) Shaoqing Xiao et al. Scientific Reports
- Insight on the Characterization of MoS2Based Devices and Requirements for Logic Device Integration
- (2016) César J. Lockhart de la Rosa et al. ECS Journal of Solid State Science and Technology
- Effects of plasma treatment on surface properties of ultrathin layered MoS2
- (2016) Suhhyun Kim et al. 2D Materials
- Universal low-temperature Ohmic contacts for quantum transport in transition metal dichalcogenides
- (2016) Shuigang Xu et al. 2D Materials
- Direct Bandgap Transition in Many-Layer MoS2by Plasma-Induced Layer Decoupling
- (2015) Rohan Dhall et al. ADVANCED MATERIALS
- Thermal Oxidation of WSe2 Nanosheets Adhered on SiO2/Si Substrates
- (2015) Yingnan Liu et al. NANO LETTERS
- Electronic Transport of Encapsulated Graphene and WSe2 Devices Fabricated by Pick-up of Prepatterned hBN
- (2015) Joel I-Jan Wang et al. NANO LETTERS
- Metal–insulator crossover in multilayered MoS2
- (2015) Min Ji Park et al. Nanoscale
- Tuning the threshold voltage of MoS2field-effect transistors via surface treatment
- (2015) Wei Sun Leong et al. Nanoscale
- Controlled MoS2 layer etching using CF4 plasma
- (2015) Min Hwan Jeon et al. NANOTECHNOLOGY
- Bulk transport and contact limitation of MoS2multilayer flake transistors untangled via temperature-dependent transport measurements
- (2015) Ilja Vladimirov et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Effect of disorder on Raman scattering of single-layerMoS2
- (2015) Sandro Mignuzzi et al. PHYSICAL REVIEW B
- Edge-terminated molybdenum disulfide with a 9.4-Å interlayer spacing for electrochemical hydrogen production
- (2015) Min-Rui Gao et al. Nature Communications
- Nanochannel arrays etched into hexagonal boron nitride meso-membranes by a focused ion beam
- (2015) S. Linas et al. RSC Advances
- Layer dependence and gas molecule absorption property in MoS2 Schottky diode with asymmetric metal contacts
- (2015) Hyong Seo Yoon et al. Scientific Reports
- Dispersive growth and laser-induced rippling of large-area singlelayer MoS2 nanosheets by CVD on c-plane sapphire substrate
- (2015) Hongfei Liu et al. Scientific Reports
- Oxidative Etching of Hexagonal Boron Nitride Toward Nanosheets with Defined Edges and Holes
- (2015) Yunlong Liao et al. Scientific Reports
- Field-Effect Transistors Built from All Two-Dimensional Material Components
- (2014) Tania Roy et al. ACS Nano
- Microwave-Plasma Dry-Etch for Fabrication of Conducting Polymer Microelectrodes
- (2014) Richard F. Vreeland et al. ANALYTICAL CHEMISTRY
- Single-layer MoS2 roughness and sliding friction quenching by interaction with atomically flat substrates
- (2014) J. Quereda et al. APPLIED PHYSICS LETTERS
- Temperature dependent Raman spectroscopy of chemically derived few layer MoS2 and WS2 nanosheets
- (2014) M. Thripuranthaka et al. APPLIED PHYSICS LETTERS
- Transport Properties of Monolayer MoS2 Grown by Chemical Vapor Deposition
- (2014) Hennrik Schmidt et al. NANO LETTERS
- Thermal conductivity determination of suspended mono- and bilayer WS2 by Raman spectroscopy
- (2014) Namphung Peimyoo et al. Nano Research
- Tuning the electrical property via defect engineering of single layer MoS2by oxygen plasma
- (2014) Muhammad R. Islam et al. Nanoscale
- Wet chemical thinning of molybdenum disulfide down to its monolayer
- (2014) Kiran Kumar Amara et al. APL Materials
- Layer-by-Layer Thinning of MoS2 by Plasma
- (2013) Yulu Liu et al. ACS Nano
- Flexible and Transparent MoS2 Field-Effect Transistors on Hexagonal Boron Nitride-Graphene Heterostructures
- (2013) Gwan-Hyoung Lee et al. ACS Nano
- Synthesis and Transfer of Single-Layer Transition Metal Disulfides on Diverse Surfaces
- (2013) Yi-Hsien Lee et al. NANO LETTERS
- An innovative way of etching MoS2: Characterization and mechanistic investigation
- (2013) Yuan Huang et al. Nano Research
- Layer-by-layer thinning of MoS2by thermal annealing
- (2013) Xin Lu et al. Nanoscale
- Graphene–MoS2 hybrid structures for multifunctional photoresponsive memory devices
- (2013) Kallol Roy et al. Nature Nanotechnology
- Photoluminescence emission and Raman response of monolayer MoS_2, MoSe_2, and WSe_2
- (2013) Philipp Tonndorf et al. OPTICS EXPRESS
- Raman-scattering measurements and first-principles calculations of strain-induced phonon shifts in monolayer MoS2
- (2013) C. Rice et al. PHYSICAL REVIEW B
- Monolayer $\hbox{MoS}_{2}$ Transistors Beyond the Technology Road Map
- (2012) Khairul Alam et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Integrated Circuits Based on Bilayer MoS2 Transistors
- (2012) Han Wang et al. NANO LETTERS
- Laser-Thinning of MoS2: On Demand Generation of a Single-Layer Semiconductor
- (2012) A. Castellanos-Gomez et al. NANO LETTERS
- Thickness identification of two-dimensional materials by optical imaging
- (2012) Ying Ying Wang et al. NANOTECHNOLOGY
- Large-Area Vapor-Phase Growth and Characterization of MoS2Atomic Layers on a SiO2Substrate
- (2012) Yongjie Zhan et al. Small
- Integrated Circuits and Logic Operations Based on Single-Layer MoS2
- (2011) Branimir Radisavljevic et al. ACS Nano
- Single-layer MoS2 transistors
- (2011) B. Radisavljevic et al. Nature Nanotechnology
- Anomalous Lattice Vibrations of Single- and Few-Layer MoS2
- (2010) Changgu Lee et al. ACS Nano
- Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition
- (2008) Alfonso Reina et al. NANO LETTERS
Publish scientific posters with Peeref
Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.
Learn MoreCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now