Effects of oxygen content on the structural, optical, and electrical properties of NiO films fabricated by radio-frequency magnetron sputtering

标题
Effects of oxygen content on the structural, optical, and electrical properties of NiO films fabricated by radio-frequency magnetron sputtering
作者
关键词
Nickel oxide, Radio-frequency sputtering, X-ray diffraction, Polycrystalline, Bandgap, X-ray photoelectron spectroscopy
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 71, Issue -, Pages 396-400
出版商
Elsevier BV
发表日期
2017-09-12
DOI
10.1016/j.mssp.2017.09.002

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