Resistive switching characteristics of MIM structures based on oxygen-variable ultra-thin HfO 2 and fabricated at low temperature

标题
Resistive switching characteristics of MIM structures based on oxygen-variable ultra-thin HfO 2 and fabricated at low temperature
作者
关键词
HfO, 2, Oxygen vacancy, ReRAM, Resistive switching, Low thermal budget
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 66, Issue -, Pages 191-199
出版商
Elsevier BV
发表日期
2017-05-25
DOI
10.1016/j.mssp.2017.05.001

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