TOF MS Investigation of Nickel Oxide CVD

标题
TOF MS Investigation of Nickel Oxide CVD
作者
关键词
Gas-phase, bis-(ethylcyclopentadienyl) nickel, MOCVD, NiO, Reaction scheme
出版物
JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY
Volume 28, Issue 11, Pages 2352-2360
出版商
Springer Nature
发表日期
2017-08-11
DOI
10.1007/s13361-017-1765-1

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