MEMS based hydrogen sensor with the highly porous Au-CNT film as a sensing material

标题
MEMS based hydrogen sensor with the highly porous Au-CNT film as a sensing material
作者
关键词
-
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 28, Issue 18, Pages 13540-13547
出版商
Springer Nature
发表日期
2017-05-26
DOI
10.1007/s10854-017-7193-y

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