Deposition, characterization and gas sensors application of RF magnetron-sputtered terbium-doped ZnO films

标题
Deposition, characterization and gas sensors application of RF magnetron-sputtered terbium-doped ZnO films
作者
关键词
Oxygen Vacancy, Sensor Response, Terbium, Zinc Oxide, Ethanol Vapor
出版物
JOURNAL OF MATERIALS SCIENCE
Volume 52, Issue 14, Pages 8502-8517
出版商
Springer Nature
发表日期
2017-03-31
DOI
10.1007/s10853-017-1059-9

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