Effects of hydrogen incorporation on structural, optical and electrical properties of germanium carbon films prepared with RF magnetron co-sputtering

出版年份 2017 全文链接

标题

作者

关键词

Germanium carbon, Magnetron co-sputtering, Structural disorder degree, Optical properties, Electrical resistivity

出版物

Volume 694, Issue -, Pages 647-652

出版商

Elsevier BV

发表日期

2016-10-11

DOI

10.1016/j.jallcom.2016.10.046

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