Article
Chemistry, Multidisciplinary
Deying Xia, John Notte
Summary: 3D nanostructures are crucial for creating custom devices with unique functionalities. This study presents a method using ion beams to induce bending and folding in membranes, resulting in the formation of nano-kirigamis with controlled angles and directions. The approach involves milling 2D patterns into the membrane using helium or neon ion beams, followed by broad and uniform irradiation using gallium ion beams to induce out-of-plane bending. This technique allows for the fabrication of complex 3D nanostructures and branched nanowires.
ADVANCED MATERIALS INTERFACES
(2022)
Article
Chemistry, Physical
Chiu-Yen Wang, An-Hsuan Hsu, Yi-Chen Lin, Ya-Chu Hsu
Summary: Monocrystalline InSe nanowires with a [100] growth direction were successfully prepared via vacuum hydraulic pressure injection at low temperature. The fabricated nanowires were used to create a high-responsivity photodetector with low dark current and rapid rise and fall times.
JOURNAL OF ALLOYS AND COMPOUNDS
(2022)
Article
Chemistry, Multidisciplinary
Evgeny Mikheev, Tino Zimmerling, Amelia Estry, Philip J. W. Moll, David Goldhaber-Gordon
Summary: In this work, two previously incompatible techniques are combined to define electronic devices. By using focused ion beam (FIB) to shape three-dimensional crystals and two-dimensional electrostatic accumulation of charge carriers, a sacrificial protective layer is used to preserve the surface quality. The accumulation of charge carriers using ionic liquid gating demonstrates the superconductivity of the accumulated carriers, and this technique opens new possibilities for electrostatic charge tuning in materials.
Article
Chemistry, Inorganic & Nuclear
Pablo Orus, Fabian Sigloch, Soraya Sangiao, Jose Maria De Teresa
Summary: Ga+ Focused Ion Beam Induced Deposition (FIBID) is a nanopatterning technique that utilizes a focused beam of Ga+ ions to locally induce the decomposition of a gaseous precursor material. By stacking individual patterns, growth along the vertical direction can be achieved, resulting in nanopillars with heights up to 10 μm and potential applications in the design of 3D superconducting devices.
JOURNAL OF SOLID STATE CHEMISTRY
(2022)
Article
Chemistry, Physical
Deying Xia, Ying-Bing Jiang, John Notte, Doug Runt
Summary: This study compares the usage of a neon focused ion beam with the traditional gallium focused ion beam for milling GaAs material, finding that neon FIB produces less undesired artifacts and subsurface damage at lower energies. Additionally, neon FIB can create trenches as small as 20 nm wide with high fidelity and minimal damage.
APPLIED SURFACE SCIENCE
(2021)
Article
Chemistry, Analytical
Frances I. Allen
Summary: Helium ion beam induced deposition using gaseous precursor pentamethylcyclopentasiloxane is employed to fabricate high aspect ratio insulator nanostructures that exhibit charge induced branching. By increasing the precursor flow rate, the vertical growth rate and branching phenomenon can be significantly enhanced, with fractalesque branching patterns observed. This direct-write ion beam nanofabrication technique offers a fast single-step method for growing high aspect ratio branched nanostructures with site-selective placement on the nanometer scale.
Article
Biochemistry & Molecular Biology
Nikita Shandyba, Sergey Balakirev, Vladislav Sharov, Natalia Chernenko, Danil Kirichenko, Maxim Solodovnik
Summary: This paper presents experimental studies on the effect of Ga-focused ion beam (FIB) surface modification on Si(111) on the growth of GaAs nanowires (NWs). The authors observed three different modes of surface features on the GaAs NW growth based on the dose of Ga ions during surface modification. At low doses, NW growth is suppressed, while high-density GaAs NW arrays with a high fraction of vertically aligned nanowires are achieved at medium doses. At high doses, a continuous polycrystalline base with misoriented and thin GaAs NWs is formed. The interaction between the implanted Ga ions and the surface plays a key role in the modification and growth processes.
INTERNATIONAL JOURNAL OF MOLECULAR SCIENCES
(2023)
Article
Nanoscience & Nanotechnology
Nikita Shandyba, Danil Kirichenko, Vladislav Sharov, Natalia Chernenko, Sergey Balakirev, Maxim Solodovnik
Summary: A novel phenomenon is revealed after self-catalytic growth of GaAs nanowires (NWs) on Ga focused ion beam (FIB) treated Si(111) substrates. The growth of GaAs NWs and nanocrystals is suppressed at an ion dose of around 0.1 pCμm-2, but further increase in ion dose stimulates crystal growth, leading to the formation of extremely thin NWs with a high surface density.
Article
Nanoscience & Nanotechnology
Zhen-Xuan He, Qiang Li, Xiao-Lei Wen, Ji-Yang Zhou, Wu-Xi Lin, Zhi-He Hao, Jin-Shi Xu, Chuan-Feng Li, Guang-Can Guo
Summary: Precise generation of single silicon vacancy defect arrays in silicon carbide was achieved using a helium-ion microscope. The generated silicon vacancies were identified through optical detection and photoluminescence spectra. By optimizing the ion dose, high conversion yield and generation rate were realized. This work paves the way for integrating and engineering color centers in photonic structures and utilizing spin defects in silicon carbide for quantum sensing applications.
Article
Materials Science, Multidisciplinary
Guan-Lin Liu, Xin-Yu Wu, Peng-Tao Jing, Zhen Cheng, Da Zhan, Yang Bao, Jia-Xu Yan, Hai Xu, Li-Gong Zhang, Bing-Hui Li, Ke-Wei Liu, Lei Liu, De-Zhen Shen
Summary: This research demonstrates position-controlled single photon emitters (SPEs) in hexagonal boron nitride (hBN) using a two-step method combining focused helium ion beam (He+ FIB) irradiation with thermal annealing in an oxygen atmosphere. The positioning accuracy of the FIB fabricated pit is less than 50 nm. Moreover, the SPE conversion yield is over 35% and the emission brightness achieved up to 3 x 105 cps at room temperature.
ADVANCED OPTICAL MATERIALS
(2023)
Article
Engineering, Multidisciplinary
Chen Fang, Qing Chai, Ye Chen, Yan Xing, Zaifa Zhou
Summary: This study proposes an error-adaptive pattern generation tool to construct controllable and complex nano-helices at the nanoscale. It enriches the types of nano-helices and provides reliable processing strategies, enhancing the tunability of chiro-optical properties.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2022)
Article
Physics, Multidisciplinary
Ziwen Chen, Yulong Li, Rui Zhu, Jun Xu, Tiequan Xu, Dali Yin, Xinwei Cai, Yue Wang, Jianming Lu, Yan Zhang, Ping Ma
Summary: As a newly developed method, focused helium ion beam offers the advantage of producing reliable and reproducible Josephson junctions. In this study, Josephson junctions were fabricated on 50 nm YBa2Cu3O7 - delta (YBCO) thin films using a focused helium ion beam. The experiment showed that the junction barrier can be modulated by the ion dose, and within a certain dose range, the junctions exhibit superconductor-normal conductor-superconductor characteristics. The measurement results demonstrate the high reproducibility of junction fabrication using a focused helium ion beam and suggest the possibility of commercial devices based on this nanotechnology operating at liquid nitrogen temperatures.
CHINESE PHYSICS LETTERS
(2022)
Article
Optics
Halo Dalshad Omar, Md. Roslan Hashim, Mohd Zamir Pakhuruddin
Summary: This study investigates the surface morphological and optical properties of flexible black silicon (b-Si) fabricated by metal-assisted chemical etching (MACE). The results show that flexible b-Si etched for 20 minutes exhibits nanowires with optimal length for enhanced broadband light absorption, leading to improved short-circuit current density in the b-Si absorber compared to crystalline silicon reference.
OPTICS AND LASER TECHNOLOGY
(2021)
Article
Chemistry, Multidisciplinary
Vigneshwaran Chandrasekaran, Michael Titze, Anthony R. R. Flores, Deanna Campbell, Jacob Henshaw, Andrew C. C. Jones, Edward S. S. Bielejec, Han Htoon
Summary: Focused ion beam implantation enables precise placement of defect centers in wide bandgap semiconductors at nanometer scale. A scalable technique is demonstrated for creating single defects in commercial grade silicon carbide using repeated low dose implantation and in situ photoluminescence evaluation. An array of 9 single defects in 13 targeted locations is successfully created, achieving a yield of approximately 70%, which is significantly higher than traditional single pass ion implantation.
Article
Chemistry, Multidisciplinary
Oleksandr Buchnev, James A. Grant-Jacob, Robert W. Eason, Nikolay I. Zheludev, Ben Mills, Kevin F. MacDonald
Summary: Researchers have developed a deep learning method based on prior experience to predict the postfabrication appearance of structures manufactured by focused ion beam (FIB) milling, which can expedite the optimization process and improve reproducibility in FIB processing.
Article
Physics, Applied
Takahiro Namazu, Shun Ito, Shunsuke Kanetsuki, Shugo Miyake
JAPANESE JOURNAL OF APPLIED PHYSICS
(2017)
Article
Physics, Applied
Eri Miura-Fujiwara, Yuu Suzuki, Michiko Ito, Motoko Yamada, Sinpei Matsutake, Seigo Takashima, Hisashi Sato, Yoshimi Watanabe
JAPANESE JOURNAL OF APPLIED PHYSICS
(2018)
Article
Physics, Applied
Taisei Izumi, Nagamasa Kametani, Shugo Miyake, Shunsuke Kanetsuki, Takahiro Namazu
JAPANESE JOURNAL OF APPLIED PHYSICS
(2018)
Article
Physics, Applied
Kazuhiro Kanda, Hiroki Takamatsu, Eri Miura-Fujiwara, Hiroki Akasaka, Akihiro Saiga, Koji Tamada
JAPANESE JOURNAL OF APPLIED PHYSICS
(2018)
Article
Metallurgy & Metallurgical Engineering
Eri Miura-Fujiwara, Hiroshi Harada, Yoshinobu Tanaka, Takeyuki Kikuchi, Thoru Yamasaki
JOURNAL OF THE JAPAN INSTITUTE OF METALS AND MATERIALS
(2018)
Article
Metallurgy & Metallurgical Engineering
Yuya Ogawa, Eri Miura-Fujiwara
JOURNAL OF THE JAPAN INSTITUTE OF METALS AND MATERIALS
(2018)
Article
Materials Science, Multidisciplinary
Hoang-Phuong Phan, Karen M. Dowling, Tuan Khoa Nguyen, Toan Dinh, Debbie G. Senesky, Takahiro Namazu, Dzung Viet Dao, Nam-Trung Nguyen
MATERIALS & DESIGN
(2018)
Article
Instruments & Instrumentation
Tatsuya Fujii, Takahiro Namazu, Koichi Sudoh, Eri Miura-Fujiwara
SENSORS AND MATERIALS
(2019)
Article
Physics, Applied
Naho Mitsuishi, Eri Miura-Fujiwara, Motoko Yamada, Tadachika Chiba, Hisashi Sato, Yoshimi Watanabe, Michiko Ito, Seigo Takashima, Masaaki Nakai, Toshikazu Akahori, Masaki Tanaka, Mitsuo Niinomi, Tsutomu Takeuchi
JAPANESE JOURNAL OF APPLIED PHYSICS
(2020)
Article
Materials Science, Multidisciplinary
Yuya Ogawa, Eri Miura-Fujiwara
MATERIALS TRANSACTIONS
(2019)
Article
Chemistry, Physical
Eri Miura-Fujiwara, Soichiro Yamada, Keisuke Mizushima, Masahiko Nishijima, Yoshimi Watanabe, Toshihiro Kasuga, Mitsuo Niinomi
Summary: Specific biomedical Ti and its alloys form a bright white oxide layer with high exfoliation resistance after oxidation treatment. The oxide layers on Ti-29Nb-13Ta-4.6Zr and Ti-36Nb-2Ta-3Zr-0.3O exhibit high exfoliation stress, suitable for artificial tooth coating, while CP Ti shows lower stress. The dense microstructures and composition-graded interfacial microstructure contribute to their high exfoliation resistance.
Article
Engineering, Electrical & Electronic
Yoshiharu Goshima, Shinsuke Kashiwagi, Takahiro Namazu
Summary: This paper describes a Raman spectroscopic study to evaluate the impact of vacuum annealing on the surface modification of a focused ion beam (FIB) induced damaged layer on a single crystalline silicon substrate. It was found that vacuum annealing can partially recover the damaged layer. The comparison between phase fractions and mechanical properties provides insights into the annealing effect.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
(2023)
Article
Engineering, Electrical & Electronic
Hiromichi Ando, Takahiro Namazu
Summary: The influence of vacuum annealing on the mechanical characteristics of silicon nanowires fabricated using focused ion beam technologies was investigated. The study found that annealing can improve the mechanical properties of submicrometer-sized silicon nanowires, but has little effect on nano-sized silicon nanowires. Tensile strength was found to increase with increasing nanowire size.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
(2023)
Article
Chemistry, Physical
Ramon Arcas, Yuuki Koshino, Elena Mas-Marza, Ryuki Tsuji, Hideaki Masutani, Eri Miura-Fujiwara, Yuichi Haruyama, Seiji Nakashima, Seigo Ito, Francisco Fabregat-Santiago
Summary: A low-cost procedure has been developed for the preparation of earth-abundant Ni, Fe and NiFe decorated electrodes, showing reasonable performance in the OER. Detailed analysis of impedance spectroscopy successfully links the redox transitions of Ni with the electrochemical redox capacitance response, demonstrating the utility of impedance spectroscopy for studying electrochemical systems under operating conditions.
SUSTAINABLE ENERGY & FUELS
(2021)