Vertical, capacitive microelectromechanical switches produced via direct writing of copper wires
出版年份 2016 全文链接
标题
Vertical, capacitive microelectromechanical switches produced via direct writing of copper wires
作者
关键词
-
出版物
Microsystems & Nanoengineering
Volume 2, Issue 1, Pages -
出版商
Springer Nature
发表日期
2016-04-25
DOI
10.1038/micronano.2016.10
参考文献
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