A High-Reliability High-Linearity High-Power RF MEMS Metal-Contact Switch for DC–40-GHz Applications

An improved SPM-based contact tester for the study of microcontacts

(2012) L Chen et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

RF MEMS Metal-Contact Switches With mN-Contact and Restoring Forces and Low Process Sensitivity

(2011) Chirag D. Patel et al.   IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

An Experimental and Theoretical Investigation of Creep in Ultrafine Crystalline Nickel RF-MEMS Devices

(2011) Hao-Han Hsu et al.   IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

Miniature MEMS Switches for RF Applications

(2011) Romain Stefanini et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology

(2010) Jérémie Dhennin   Journal of Micro-Nanolithography MEMS and MOEMS

Lifetime Measurements on a High-Reliability RF-MEMS Contact Switch

(2008) H.S. Newman et al.   IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

(2008) Feixiang Ke et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS