Article
Chemistry, Physical
Hyun Min Kim, Jong Hoon Lee, Ahram Yom, Han Sol Lee, Dong Geun Kim, Dong Wan Ko, Hong Seung Kim, Ji-Hoon Ahn
Summary: SrRuO3 thin films have the potential for use as electrode layers, with key parameters such as oxygen flow ratio and post-deposition conditions needing to be carefully controlled for high-quality films to be deposited on SiO2 substrates.
JOURNAL OF ALLOYS AND COMPOUNDS
(2021)
Article
Materials Science, Multidisciplinary
Wei Mi, Xinwei Li, Yue Ding, Di Wang, Mingsheng Xu, Longfei Xiao, Xingcheng Zhang, Xinrong Chen, Bingkun Li, Liyuan Luo, Jinshi Zhao, Liwei Zhou, Junli Yu
Summary: Ga2O3 films were grown on Si (100) substrates via RF magnetron sputtering at room temperature. The large lattice mismatch led to poor crystalline quality and cracking. To solve this issue, a method combining pre-deposited seed layer and post-annealing process was proposed. The prepared film showed high crystalline quality and thickness of 160 nm when the seed layer was 9 nm and annealing temperature was 800 °C. The seed layer provided nucleation sites and alleviated lattice mismatch, while annealing promoted recrystallization and improved Ga2O3 quality. This work promotes the development of Ga2O3-based devices on Si substrates and solves the heat dissipation problem.
Article
Materials Science, Coatings & Films
Niklas Hellgren, Alexander Sredenschek, Andrejs Petruins, Justinas Palisaitis, Fedor F. Klimashin, Maurico A. Sortica, Lars Hultman, Per O. A. Persson, Johanna Rosen
Summary: Titanium boride thin films with varying B/Ti ratio were successfully grown using DC magnetron co-sputtering. The films exhibited high hardness and low resistivity, with different grain sizes and crystalline characteristics after annealing.
SURFACE & COATINGS TECHNOLOGY
(2022)
Article
Chemistry, Physical
Lei Ye, Jia Zheng, Cong Guo, Yu Hu, Jian Yu, Xiaodong Zhu, Tao Chen
Summary: This study demonstrates that high deposition pressure can significantly impact the material properties of sputtered SiC thin films, altering the chemical bonding, composition, and opto-electrical properties. It shows that an increase in deposition pressure leads to a higher oxygen content and a change in the carbon phase, potentially meeting the application requirements for optoelectronic devices.
APPLIED SURFACE SCIENCE
(2023)
Article
Chemistry, Multidisciplinary
Zhenxue Zhang, Mikdat Gurtaran, Xiaoying Li, Hio-Ieng Un, Yi Qin, Hanshan Dong
Summary: In this study, N-type and P-type BiTe-based thin films were deposited on silicon, glass, and Kapton HN polyimide foil using magnetron sputtering technique. The morphology, microstructure, and phase constituents of the thin films were characterized by SEM/EDX, XRD, and TEM. The electrical conductivity, thermal conductivity, and Seebeck coefficient were measured by an advanced in-plane test system. The power output (open-circuit voltage and electric current) of the thin films was measured at different temperature gradients using a custom-built apparatus. The impact of deposition parameters and the dimensions of the thin films on the power output were investigated to optimize the thin-film flexible TE device for thermal energy harvesting.
Article
Materials Science, Multidisciplinary
Shinho Cho
Summary: The study investigated the effects of substrate temperature on YVO4:Eu3+ phosphor thin films. It was found that all thin films exhibited a strong crystalline orientation and emission spectra in specific bands regardless of substrate temperature. Increasing substrate temperature led to enhanced red emission intensity, indicating a significant impact on the film's performance.
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
(2021)
Article
Materials Science, Multidisciplinary
Giji Skaria, Ashwin Kumar Saikumar, Akshaya D. Shivprasad, Kalpathy B. Sundaram
Summary: Copper indium oxide thin films were deposited using RF magnetron sputtering and annealed at various temperatures, leading to increased grain size and crystallinity. The films exhibited high optical transmission and a small bandgap change during annealing.
Article
Materials Science, Multidisciplinary
E. G. Fridriksson, T. K. Tryggvason, U. B. Arnalds, A. S. Ingason, F. Magnus
Summary: In this study, different crystal phases of niobium oxides films were successfully synthesized by reactive dc magnetron sputtering and vacuum annealing, and the crystal formation was controlled by adjusting the oxygen flow and annealing temperature.
Article
Nanoscience & Nanotechnology
Xudong Tao, Bryan W. Stuart, Kening Wan, James W. Murray, Emiliano Bilotti, Hazel E. Assender
Summary: High-throughput roll-to-roll processes are desirable for scaling up the production of flexible thermoelectric generators. Postdeposition in-line annealing processes have been explored to improve the functional performance of as-deposited films, with static vacuum oven treatment showing the most significant enhancement in film crystallinity and power factor. Infrared and electron-beam post treatments during in-line annealing also showed improvements in the power factor of bismuth telluride thin films.
ACS APPLIED MATERIALS & INTERFACES
(2021)
Review
Chemistry, Physical
Yuxin Ju, Ling Ai, Xiaopeng Qi, Jia Li, Weijie Song
Summary: This review comprehensively examines the scalable and highly reproducible nature of magnetron sputtering for depositing hydrophobic thin films. It outlines the fundamental mechanism of hydrophobicity and summarizes recent advances in the preparation, characteristics, and applications of thin films derived from oxides, polytetrafluoroethylene (PTFE), and diamond-like carbon (DLC). The review also discusses the future applications, current challenges, and development of hydrophobic thin films, providing a brief perspective on future research directions.
Article
Engineering, Chemical
Ning Liu, Hongsen Zhang, Qi Liu, Jiahui Zhu, Rongrong Chen, Jing Yu, Ying Li, Rumin Li, Jun Wang
Summary: In this paper, TiO2/FTO films were prepared using magnetron sputtering on the surface of FTO to achieve efficient extraction and desalination of U(VI) from seawater. The films demonstrated high extraction ratio and sterilization efficiency.
Article
Materials Science, Ceramics
Pakinee Thongrit, Chanunthorn Chananonnawathorn, Mati Horprathum, Narit Triamnak, Tossaporn Lertvanithphol, Sukum Eitssayeam, Kamonpan Pengpat, Patamas Bintachitt
Summary: In this research, high-quality PZT thin films were deposited on (111)Pt/Ti/SiO2/(100)Si substrates by RF magnetron sputtering. Annealing at different temperatures improved the microstructure and properties of the thin films. The results showed that annealing temperature influenced the film thickness, density, and crystallinity of PZT films.
CERAMICS INTERNATIONAL
(2023)
Article
Materials Science, Multidisciplinary
A. A. Serdobintsev, V. V. Galushka, L. D. Volkovoynova, I. O. Kozhevnikov, E. S. Prikhozhdenko, D. I. Artyukhov, N. V. Gorshkov, A. M. Pavlov, A. V. Starodubov
Summary: This study reports on the effects of aluminum and silicon segregation in mu m-thick magnetron co-deposited Si-Al films. It was found that an increase in aluminum content leads to the segregation of a separate crystalline phase, accompanied by the emergence of the c-Si phase. Silicon crystallization process is controlled by the redistribution of components in the film, which can be attributed to aluminum-induced crystallization process. The redistribution of aluminum and silicon phases in the amorphous matrix can be utilized to customize the electrophysical properties of the resulting coatings for applications in mm-band RF devices.
Article
Materials Science, Multidisciplinary
Zhen-Dong Wang, Zhen-Quan Lai
Summary: A single (200)-oriented TiN thin film was successfully deposited on a quartz substrate by DC magnetron reactive sputtering process, and the effects of sputtering pressure and substrate temperature on the properties of the film were studied. The results showed that a single (200)-oriented TiN thin film with increased grain size can be obtained over a wide range of substrate temperatures. The film exhibited low resistivity and high optical reflectance.
Article
Chemistry, Multidisciplinary
Holger Schwarz, Jonathan Apell, Ha Kit Wong, Peter Henning, Robert Wonneberger, Niels Roesch, Thomas Uhlig, Felix Ospald, Guntram Wagner, Andreas Undisz, Thomas Seyller
Summary: High-entropy alloys (HEAs) have garnered attention in material science due to their limitless composition possibilities. Recently, their use as tunable electrocatalysts has become a focus. However, there is limited research on fundamental properties of HEA surfaces, such as atomic and electronic structure, surface segregation and diffusion, and adsorption. This lack of research is due to the limited availability of single-crystalline samples.
ADVANCED MATERIALS
(2023)