Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
出版年份 2016 全文链接
标题
Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
作者
关键词
-
出版物
Materials
Volume 9, Issue 8, Pages 695
出版商
MDPI AG
发表日期
2016-08-15
DOI
10.3390/ma9080695
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- The Effects of Zr Doping on the Optical, Electrical and Microstructural Properties of Thin ZnO Films Deposited by Atomic Layer Deposition
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