Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition

标题
Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
作者
关键词
-
出版物
Materials
Volume 9, Issue 8, Pages 695
出版商
MDPI AG
发表日期
2016-08-15
DOI
10.3390/ma9080695

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