Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
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Title
Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
Authors
Keywords
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Journal
Materials
Volume 9, Issue 8, Pages 695
Publisher
MDPI AG
Online
2016-08-15
DOI
10.3390/ma9080695
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