Effect of bias on the structure and properties of TiZrN thin films deposited by unbalanced magnetron sputtering

出版年份 2016 全文链接

标题

作者

关键词

Titanium zirconium nitride, Hardness, Residual stress, Magnetron sputtering

出版物

THIN SOLID FILMS

Volume 618, Issue -, Pages 13-20

出版商

Elsevier BV

发表日期

2016-05-19

DOI

10.1016/j.tsf.2016.05.021

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