Effects of intermittent atomization on the properties of Al-doped ZnO thin films deposited by aerosol-assisted chemical vapor deposition

出版年份 2016 全文链接

标题

作者

关键词

Aluminum-doped zinc oxide;, Aerosol-assisted chemical vapor deposition;, Atomization interval time

出版物

Volume 605, Issue -, Pages 163-168

出版商

Elsevier BV

发表日期

2015-09-08

DOI

10.1016/j.tsf.2015.09.011

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