Microstructure and micromorphology of ZnO thin films: Case study on Al doping and annealing effects

标题
Microstructure and micromorphology of ZnO thin films: Case study on Al doping and annealing effects
作者
关键词
AZO thin films, Radio frequency sputtering, AFM, Fractal analysis, Three-dimensional Surface micromorphology
出版物
SUPERLATTICES AND MICROSTRUCTURES
Volume 93, Issue -, Pages 109-121
出版商
Elsevier BV
发表日期
2016-03-03
DOI
10.1016/j.spmi.2016.03.003

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