标题
Effect of stepped Si (001) substrate on Cu thin film growth
作者
关键词
-
出版物
Surface Topography-Metrology and Properties
Volume 11, Issue 3, Pages 035020
出版商
IOP Publishing
发表日期
2023-09-21
DOI
10.1088/2051-672x/acfb9b
参考文献
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