标题
Effect of stepped Si (001) substrate on Cu thin film growth
作者
关键词
-
出版物
Surface Topography-Metrology and Properties
Volume 11, Issue 3, Pages 035020
出版商
IOP Publishing
发表日期
2023-09-21
DOI
10.1088/2051-672x/acfb9b
参考文献
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- (2023) H. Mes-adi et al. COMPUTATIONAL MATERIALS SCIENCE
- Effects of Different Silicon Substrates on the Structure and Properties of Deposited Diamond‐like Carbon Films
- (2023) Huizhong Ma et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Growth and annealing effect on the Cu thin film deposited on Si (0 0 1) surface
- (2022) H. Mes-adi et al. JOURNAL OF CRYSTAL GROWTH
- Influence of atomic incident kinetic energy on crystalline quality of epitaxial GaN thin films: A molecular dynamics study
- (2022) Rui Li et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Effect of incident angle on the microstructure proprieties of Cu thin film deposited on Si (001) substrate
- (2021) H. Mes-adi et al. THIN SOLID FILMS
- Atomistic modeling of physical vapor deposition on complex topology substrates
- (2021) Michael G. Eberhardt et al. COMPUTATIONAL MATERIALS SCIENCE
- Effect of annealing and deposition of Cu atoms on Ni trench to interface formation and growth mechanisms of Cu coating
- (2020) Anh-Vu Pham et al. SUPERLATTICES AND MICROSTRUCTURES
- Morphology and surface properties of Cu thin film on Si (001)
- (2020) H. Mes-adi et al. THIN SOLID FILMS
- Physical vapor deposition technology for coated cutting tools: A review
- (2020) Yang Deng et al. CERAMICS INTERNATIONAL
- Application of a large-scale molecular dynamics approach to modelling the deposition of TiO2 thin films
- (2020) F.V. Grigoriev et al. COMPUTATIONAL MATERIALS SCIENCE
- Ab initio nonadiabatic molecular dynamics investigations on the excited carriers in condensed matter systems
- (2019) Qijing Zheng et al. Wiley Interdisciplinary Reviews-Computational Molecular Science
- TiN film growth on misoriented TiN grains with simultaneous low-energy bombardment: Restructuring leading to epitaxy
- (2019) D. Edström et al. THIN SOLID FILMS
- The investigation of molecular beam epitaxy growth of GaN by molecular dynamics simulation
- (2019) Kang Liang et al. COMPUTATIONAL MATERIALS SCIENCE
- Physical vapor deposition of 2D Van der Waals materials: a review
- (2019) Christopher Muratore et al. THIN SOLID FILMS
- Molecular dynamics simulation of temperature effects on deposition of Cu film on Si by magnetron sputtering
- (2018) Guo Zhu et al. JOURNAL OF CRYSTAL GROWTH
- Recent developments of truly stretchable thin film electronic and optoelectronic devices
- (2018) Juan Zhao et al. Nanoscale
- Large-scale molecular dynamics simulations of TiN/TiN(001) epitaxial film growth
- (2016) Daniel Edström et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
- Recent progress on thin-film encapsulation technologies for organic electronic devices
- (2016) Duan Yu et al. OPTICS COMMUNICATIONS
- Perspectives on oblique angle deposition of thin films: From fundamentals to devices
- (2016) Angel Barranco et al. PROGRESS IN MATERIALS SCIENCE
- Electrodeposition of copper thin films from 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide
- (2014) Tomin Liu et al. JOURNAL OF APPLIED ELECTROCHEMISTRY
- Nano-crystallization and magnetic mechanisms of Fe85Si2B8P4Cu1 amorphous alloy by ab initio molecular dynamics simulation
- (2014) Yaocen Wang et al. JOURNAL OF APPLIED PHYSICS
- An interatomic potential for saturated hydrocarbons based on the modified embedded-atom method
- (2014) S. Nouranian et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Comparison of Cu thin films deposited on Si substrates with different surfaces and temperatures
- (2013) Jun Zhang et al. APPLIED SURFACE SCIENCE
- Residual stresses in thin film systems: Effects of lattice mismatch, thermal mismatch and interface dislocations
- (2013) Alireza Moridi et al. INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
- Effects of Temperature Control Algorithms on Transport Properties and Kinetics in Molecular Dynamics Simulations
- (2013) Joseph E. Basconi et al. Journal of Chemical Theory and Computation
- Modified embedded atom method potential for Al, Si, Mg, Cu, and Fe alloys
- (2012) B. Jelinek et al. PHYSICAL REVIEW B
- Molecular dynamics investigation of deposition and annealing behaviors of Cu atoms onto Cu(001) substrate
- (2011) Xing-bin Jing et al. APPLIED SURFACE SCIENCE
- Atomistic study of deposition process of Al thin film on Cu substrate
- (2010) Yongzhi Cao et al. APPLIED SURFACE SCIENCE
- Preparation and characterization of catalyst thin films
- (2009) Christian Guizard et al. CATALYSIS TODAY
- Resistivity of thin Cu films with surface roughness
- (2009) Youqi Ke et al. PHYSICAL REVIEW B
- Anomalous behaviour of the diffusion coefficient in interacting adsorbates
- (2009) S. Zayzoune et al. SURFACE SCIENCE
- A modified embedded-atom method interatomic potential for the Cu–Zr system
- (2008) Young-Min Kim et al. JOURNAL OF MATERIALS RESEARCH
- Back-illuminated silicon resonant cavity-enhanced photodetector at 1550nm
- (2008) M. Casalino et al. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES
- Stable elasticity of epitaxial Cu thin films on Si
- (2008) N. Nakamura et al. PHYSICAL REVIEW B
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