Perspectives on oblique angle deposition of thin films: From fundamentals to devices

标题

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

作者

关键词

Oblique angle deposition, Glancing angle deposition, Magnetron sputtering, Electron beam evaporation, Nanostructured films, Growth modeling, Monte Carlo, Thin film devices, Transparent conductive oxide, Energy harvesting, Sensors, Optical devices, Wetting, Biomaterials, Biosensing, GLAD, Photovoltaic cells

出版物

PROGRESS IN MATERIALS SCIENCE

Volume 76, Issue -, Pages 59-153

出版商

Elsevier BV

发表日期

2015-08-29

DOI

10.1016/j.pmatsci.2015.06.003