Strain mapping of semiconductor specimens with nm-scale resolution in a transmission electron microscope

出版年份 2016 全文链接

标题

作者

关键词

Strain mapping, Dark field electron holography, Nanobeam diffraction, Geometrical phase analysis, Precession diffraction, Semiconductors

出版物

Volume 80, Issue -, Pages 145-165

出版商

Elsevier BV

发表日期

2015-09-16

DOI

10.1016/j.micron.2015.09.001

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